UWR-10N

• Siloxane-free beam‑type load cell (no siloxane generation/outgassing)
• Rated capacity: 10 N
• Overload: 300% of rated capacity
• Nonlinearity: 0.03% of rated output (R.O.)
• Applications: managing grip force of wafer transfer robots; controlling applied force during wafer polishing or wire bonding; load control for chip mounters